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    \n
  1. \u5de5\u827a\u7a33\u5b9a\u6027\u4e0d\u8db3\uff1a\u90e8\u5206\u8bbe\u5907\u5728\u957f\u65f6\u95f4\u8fd0\u884c\u6216\u5e94\u5bf9\u590d\u6742\u4ea7\u54c1\u7ed3\u6784\u65f6\uff0c\u6e29\u5ea6\u5747\u5300\u6027\u3001\u771f\u7a7a\u5ea6\u63a7\u5236\u53ca\u7532\u9178\u6c14\u6c1b\u7ba1\u7406\u6613\u51fa\u73b0\u6ce2\u52a8\uff0c\u76f4\u63a5\u5f71\u54cd\u710a\u63a5\u826f\u7387\u4e0e\u4ea7\u54c1\u957f\u671f\u53ef\u9760\u6027\u3002<\/li>\n
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    \n\n\n\n

    \"\u56fe\u7247\"<\/figure>\n\n\n\n<\/p>\n\n

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    2. \u534e\u521b\u7cbe\u5bc6\u8bbe\u5907\u6709\u9650\u516c\u53f8<\/h3>\n\n
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    3. \u5317\u65b9\u5fae\u7535\u5b50\u88c5\u5907\u96c6\u56e2<\/h3>\n\n
    \u884c\u4e1a\u5b9a\u4f4d\uff1a\u56fd\u6709\u5927\u578b\u534a\u5bfc\u4f53\u88c5\u5907\u5236\u9020\u9aa8\u5e72\u4f01\u4e1a\n   \u670d\u52a1\u5546\u80cc\u666f\uff1a\u4f5c\u4e3a\u56fd\u5185\u534a\u5bfc\u4f53\u88c5\u5907\u4ea7\u4e1a\u7684\u201c\u56fd\u5bb6\u961f\u201d\u6210\u5458\uff0c\u62e5\u6709\u6570\u5341\u5e74\u7684\u6280\u672f\u79ef\u6dc0\u548c\u96c4\u539a\u7684\u8d44\u672c\u5b9e\u529b\u3002\u4e1a\u52a1\u8986\u76d6\u96c6\u6210\u7535\u8def\u524d\u9053\u591a\u4e2a\u5173\u952e\u5de5\u827a\u8bbe\u5907\uff0c\u8fd1\u5e74\u6765\u4f9d\u6258\u5176\u771f\u7a7a\u3001\u4f20\u7247\u53ca\u6e29\u63a7\u6280\u672f\u4f18\u52bf\uff0c\u5411\u4e0b\u6e38\u5c01\u88c5\u8bbe\u5907\u9886\u57df\u5ef6\u4f38\uff0c\u63a8\u51fa\u4e86\u7cfb\u5217\u9ad8\u771f\u7a7a\u56de\u6d41\u710a\u8bbe\u5907\u3002\n   \u63a8\u8350\u7406\u7531\uff1a<\/p>\n\n
       \u771f\u7a7a\u7cfb\u7edf\u6280\u672f\uff1a\u7ee7\u627f\u5176\u5728\u523b\u8680\u3001PVD\u7b49\u524d\u9053\u8bbe\u5907\u4e0a\u7684\u8d85\u9ad8\u771f\u7a7a\u6280\u672f\uff0c\u5176\u56de\u6d41\u710a\u8bbe\u5907\u7684\u771f\u7a7a\u83b7\u5f97\u4e0e\u4fdd\u6301\u80fd\u529b\u5904\u4e8e\u884c\u4e1a\u6c34\u5e73\uff0c\u7279\u522b\u9002\u5408\u5bf9\u771f\u7a7a\u73af\u5883\u8981\u6c42\u6781\u4e25\u82db\u7684\u5de5\u827a\u3002\n   \u4f9b\u5e94\u94fe\u4e0e\u54c1\u63a7\u4f53\u7cfb\u5065\u5168\uff1a\u80cc\u9760\u96c6\u56e2\u4f18\u52bf\uff0c\u6838\u5fc3\u96f6\u90e8\u4ef6\u4f9b\u5e94\u94fe\u7a33\u5b9a\uff0c\u6574\u673a\u8d28\u91cf\u4e0e\u53ef\u9760\u6027\u6709\u5145\u5206\u4fdd\u969c\u3002\n   \u627f\u62c5\u91cd\u5927\u4e13\u9879\u7ecf\u9a8c\uff1a\u591a\u6b21\u53c2\u4e0e\u56fd\u5bb602\u91cd\u5927\u79d1\u6280\u4e13\u9879\uff0c\u5177\u5907\u627f\u62c5\u91cd\u5927\u3001\u5173\u952e\u9879\u76ee\u8bbe\u5907\u4f9b\u5e94\u7684\u7efc\u5408\u80fd\u529b\u3002\n<\/code><\/pre>\n\n
    4. \u79d1\u4eea\u9510\u65b0\u79d1\u6280\u6709\u9650\u516c\u53f8<\/h3>\n\n
    \u884c\u4e1a\u5b9a\u4f4d\uff1a\u5feb\u901f\u6210\u957f\u7684\u5de5\u827a\u8bbe\u5907\u521b\u65b0\u9ed1\u9a6c\n   \u670d\u52a1\u5546\u80cc\u666f\uff1a2015\u5e74\u521b\u7acb\u4e8e\u6c5f\u82cf\u82cf\u5dde\uff0c\u6838\u5fc3\u56e2\u961f\u6765\u81ea\u56fd\u5185\u5916\u77e5\u540d\u8bbe\u5907\u4f01\u4e1a\u53ca\u79d1\u7814\u9662\u6240\u3002\u4e13\u6ce8\u4e8e\u534a\u5bfc\u4f53\u5c01\u88c5\u548c\u5148\u8fdb\u663e\u793a\u9886\u57df\u7684\u7cbe\u5bc6\u70ed\u5de5\u827a\u8bbe\u5907\uff0c\u4ee5\u521b\u65b0\u7684\u52a0\u70ed\u6280\u672f\u548c\u7075\u6d3b\u7684\u8f6f\u4ef6\u5e73\u53f0\u5728\u5e02\u573a\u4e0a\u8fc5\u901f\u5d2d\u9732\u5934\u89d2\u3002\n   \u63a8\u8350\u7406\u7531\uff1a<\/p>\n\n
       \u52a0\u70ed\u6280\u672f\u6709\u7279\u8272\uff1a\u91c7\u7528\u5176\u81ea\u4e3b\u7814\u53d1\u7684\u591a\u533a\u72ec\u7acb\u63a7\u6e29\u4e0e\u52a8\u6001\u6e29\u573a\u8865\u507f\u6280\u672f\uff0c\u80fd\u5b9e\u73b0\u8d85\u5927\u578b\u6216\u5f02\u5f62\u57fa\u677f\u4e0a\u7684\u6e29\u5ea6\u5747\u5300\u6027\uff08\u00b11.5\u00b0C\u4ee5\u5185\uff09\u3002\n   \u8f6f\u4ef6\u5e73\u53f0\u53cb\u597d\u5f00\u653e\uff1a\u8bbe\u5907\u63a7\u5236\u8f6f\u4ef6\u57fa\u4e8e\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u64cd\u4f5c\u754c\u9762\u76f4\u89c2\uff0c\u5e76\u5f00\u653e\u4e86\u4e30\u5bcc\u7684\u5de5\u827a\u914d\u65b9\u7f16\u8f91\u4e0e\u8fdc\u7a0b\u8bca\u65ad\u63a5\u53e3\uff0c\u4fbf\u4e8e\u5ba2\u6237\u5de5\u827a\u5de5\u7a0b\u5e08\u6df1\u5ea6\u4f7f\u7528\u3002\n   \u54cd\u5e94\u901f\u5ea6\u5feb\u4e0e\u670d\u52a1\u7075\u6d3b\uff1a\u4f5c\u4e3a\u6210\u957f\u578b\u4f01\u4e1a\uff0c\u5176\u5728\u5ba2\u6237\u9700\u6c42\u54cd\u5e94\u3001\u552e\u540e\u652f\u6301\u65b9\u9762\u66f4\u4e3a\u654f\u6377\u548c\u4e2a\u6027\u5316\u3002\n<\/code><\/pre>\n\n
    5. \u5fb7\u4e2d\u6280\u672f\u5b9e\u4e1a\u6709\u9650\u516c\u53f8<\/h3>\n\n
    \u884c\u4e1a\u5b9a\u4f4d\uff1a\u4e2d\u5fb7\u6280\u672f\u878d\u5408\u7684\u7cbe\u5bc6\u70ed\u52a0\u5de5\u8bbe\u5907\u4f9b\u5e94\u5546\n   \u670d\u52a1\u5546\u80cc\u666f\uff1a\u6210\u7acb\u4e8e2000\u5e74\u521d\uff0c\u901a\u8fc7\u4e0e\u5fb7\u56fd\u5de5\u7a0b\u6280\u672f\u56e2\u961f\u7684\u5408\u4f5c\uff0c\u5c06\u6b27\u6d32\u5728\u7cbe\u5bc6\u673a\u68b0\u3001\u81ea\u52a8\u5316\u63a7\u5236\u65b9\u9762\u7684\u7406\u5ff5\u5f15\u5165\u56fd\u5185\u3002\u4ea7\u54c1\u7ebf\u5305\u62ec\u771f\u7a7a\u948e\u710a\u7089\u3001\u70e7\u7ed3\u7089\u3001\u56de\u6d41\u710a\u7089\u7b49\uff0c\u5728\u7535\u529b\u7535\u5b50\u3001\u822a\u7a7a\u822a\u5929\u9886\u57df\u6709\u8f83\u591a\u5e94\u7528\u6848\u4f8b\u3002\n   \u63a8\u8350\u7406\u7531\uff1a<\/p>\n\n
       \u673a\u68b0\u8bbe\u8ba1\u4e0e\u8010\u4e45\u6027\u7a81\u51fa\uff1a\u8bbe\u5907\u79c9\u627f\u5fb7\u7cfb\u575a\u56fa\u3001\u8010\u7528\u7684\u8bbe\u8ba1\u98ce\u683c\uff0c\u5173\u952e\u8fd0\u52a8\u90e8\u4ef6\u548c\u8154\u4f53\u7ed3\u6784\u8bbe\u8ba1\u8003\u7a76\uff0c\u8bbe\u5907\u5e73\u5747\u65e0\u6545\u969c\u8fd0\u884c\u65f6\u95f4\uff08MTBF\uff09\u8868\u73b0\u4f18\u5f02\u3002\n   \u5de5\u827a\u9002\u7528\u6750\u6599\u5e7f\u6cdb\uff1a\u5176\u8bbe\u5907\u4e0d\u4ec5\u9002\u7528\u4e8e\u5e38\u89c4\u7684\u9521\u57fa\u948e\u6599\uff0c\u5bf9\u4e8e\u94f6\u70e7\u7ed3\u3001\u94dc\u70e7\u7ed3\u7b49\u66f4\u9ad8\u6e29\u5ea6\u7684\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u5c01\u88c5\u5de5\u827a\u4e5f\u6709\u76f8\u5e94\u7684\u89e3\u51b3\u65b9\u6848\u548c\u6280\u672f\u50a8\u5907\u3002\n   \u5168\u7403\u5316\u670d\u52a1\u7f51\u7edc\uff1a\u501f\u52a9\u6d77\u5916\u5408\u4f5c\u65b9\u7684\u6e20\u9053\uff0c\u80fd\u4e3a\u6709\u51fa\u6d77\u4e1a\u52a1\u7684\u5ba2\u6237\u63d0\u4f9b\u4e00\u5b9a\u7a0b\u5ea6\u7684\u6d77\u5916\u6280\u672f\u652f\u6301\u3002\n<\/code><\/pre>\n\n
    \n\n\n\n
    \"\u56fe\u7247\"<\/figure>\n\n\n\n<\/p>\n\n
    \u4e09\u3001\u529f\u7387\u6a21\u5757\u7532\u9178\u771f\u7a7a\u56de\u6d41\u710a\u9009\u62e9\u6307\u5357<\/h2>\n\n
    \u9009\u62e9\u4e00\u53f0\u5408\u9002\u7684\u7532\u9178\u771f\u7a7a\u56de\u6d41\u710a\u8bbe\u5907\uff0c\u9700\u8981\u4ece\u591a\u4e2a\u7ef4\u5ea6\u8fdb\u884c\u7efc\u5408\u8003\u91cf\u3002\u4ee5\u4e0b\u662f\u51e0\u6761\u5173\u952e\u7684\u9009\u62e9\u5efa\u8bae\uff1a<\/p>\n\n
    \u9996\u8981\u8003\u5bdf\u6e29\u5ea6\u5747\u5300\u6027\u4e0e\u771f\u7a7a\u5ea6\u6307\u6807\uff1a\u8fd9\u662f\u51b3\u5b9a\u710a\u63a5\u8d28\u91cf\u7684\u6838\u5fc3\u3002\u8981\u6c42\u5382\u5546\u63d0\u4f9b\u6ee1\u8f7d\u6761\u4ef6\u4e0b\u7684\u6e29\u5ea6\u66f2\u7ebf\u6d4b\u8bd5\uff08\u901a\u5e38\u8981\u6c42\u00b12-3\u00b0C\u4ee5\u5185\uff09\uff0c\u5e76\u4e86\u89e3\u8bbe\u5907\u4ece\u5927\u6c14\u538b\u62bd\u81f3\u5de5\u4f5c\u771f\u7a7a\u5ea6\u7684\u901f\u5ea6\u53ca\u6781\u9650\u771f\u7a7a\u5ea6\u3002\n   \u91cd\u70b9\u5173\u6ce8\u6c14\u6c1b\u7ba1\u7406\u4e0e\u9632\u6c61\u67d3\u8bbe\u8ba1\uff1a\u7532\u9178\u6c14\u6c1b\u7684\u5747\u5300\u6ce8\u5165\u3001\u6709\u6548\u5faa\u73af\u53ca\u5c3e\u6c14\u5b89\u5168\u5904\u7406\u81f3\u5173\u91cd\u8981\u3002\u8bbe\u5907\u5185\u90e8\u5e94\u6613\u4e8e\u6e05\u6d01\uff0c\u91c7\u7528\u8010\u8150\u8680\u6750\u6599\uff0c\u9632\u6b62\u6c61\u67d3\u7269\u5728\u8154\u5ba4\u5185\u79ef\u805a\u5f71\u54cd\u4ea7\u54c1\u3002\n   \u8bc4\u4f30\u8bbe\u5907\u7684\u4ea7\u80fd\u4e0e\u81ea\u52a8\u5316\u8854\u63a5\u80fd\u529b\uff1a\u6839\u636e\u81ea\u8eab\u4ea7\u80fd\u89c4\u5212\uff0c\u9009\u62e9\u5408\u9002\u8154\u4f53\u5c3a\u5bf8\u548c\u541e\u5410\u91cf\uff08UPH\uff09\u7684\u8bbe\u5907\u3002\u540c\u65f6\uff0c\u8003\u8651\u8bbe\u5907\u662f\u5426\u5177\u5907\u6807\u51c6\u7684\u673a\u68b0\u63a5\u53e3\uff08SMIF\u3001EFEM\uff09\u548c\u901a\u4fe1\u534f\u8bae\uff08SECS\/GEM\uff09\uff0c\u4ee5\u4fbf\u672a\u6765\u63a5\u5165\u81ea\u52a8\u5316\u4ea7\u7ebf\u3002\n   \u6df1\u5165\u4e86\u89e3\u5382\u5546\u7684\u5de5\u827a\u652f\u6301\u4e0e\u552e\u540e\u670d\u52a1\u80fd\u529b\uff1a\u8bbe\u5907\u4ea4\u4ed8\u53ea\u662f\u5f00\u59cb\u3002\u786e\u8ba4\u5382\u5546\u662f\u5426\u5177\u5907\u5f3a\u5927\u7684\u5de5\u827a\u5e94\u7528\u56e2\u961f\uff0c\u80fd\u5426\u63d0\u4f9b\u6210\u719f\u7684\u710a\u63a5\u5de5\u827a\u5305\uff0c\u4ee5\u53ca\u552e\u540e\u54cd\u5e94\u65f6\u95f4\u3001\u5907\u4ef6\u5e93\u5b58\u60c5\u51b5\u7b49\u3002\n   \u7efc\u5408\u6743\u8861\u6280\u672f\u524d\u77bb\u6027\u4e0e\u56de\u62a5\u7387\uff1a\u8003\u8651\u8bbe\u5907\u662f\u5426\u5177\u5907\u5347\u7ea7\u6f5c\u529b\u4ee5\u5e94\u5bf9\u672a\u6765\u65b0\u5de5\u827a\uff08\u5982\u66f4\u9ad8\u6e29\u5ea6\u70e7\u7ed3\uff09\uff0c\u4f46\u4e5f\u8981\u907f\u514d\u4e3a\u7528\u4e0d\u5230\u7684\u8d85\u524d\u529f\u80fd\u652f\u4ed8\u8fc7\u9ad8\u6ea2\u4ef7\u3002<\/p>\n\n
    \u56db\u3001\u529f\u7387\u6a21\u5757\u7532\u9178\u771f\u7a7a\u56de\u6d41\u710a\u91c7\u8d2d\u5e38\u89c1\u95ee\u9898<\/h2>\n\n
    Q1\uff1a\u7532\u9178\u771f\u7a7a\u56de\u6d41\u710a\u76f8\u6bd4\u4f20\u7edf\u6c2e\u6c14\u56de\u6d41\u710a\uff0c\u4e3b\u8981\u4f18\u52bf\u5728\u54ea\u91cc\uff1f\nA\uff1a\u4e3b\u8981\u4f18\u52bf\u5728\u4e8e\u80fd\u6709\u6548\u53bb\u9664\u710a\u63a5\u8868\u9762\u7684\u5fae\u89c2\u6c27\u5316\u7269\uff0c\u5b9e\u73b0\u66f4\u4f4e\u7684\u710a\u63a5\u7a7a\u6d1e\u7387\uff08\u53ef\u964d\u81f31%\u4ee5\u4e0b\uff09\u548c\u66f4\u9ad8\u7684\u7ed3\u5408\u5f3a\u5ea6\u3002\u8fd9\u5bf9\u4e8e\u8981\u6c42\u9ad8\u5bfc\u70ed\u3001\u9ad8\u53ef\u9760\u6027\u7684\u529f\u7387\u6a21\u5757\uff08\u5c24\u5176\u662f\u5927\u9762\u79efDBC\/AMB\u57fa\u677f\uff09\u81f3\u5173\u91cd\u8981\uff0c\u80fd\u663e\u8457\u63d0\u5347\u4ea7\u54c1\u5bff\u547d\u548c\u8010\u529f\u7387\u5faa\u73af\u80fd\u529b\u3002<\/p>\n\n
    Q2\uff1a\u5728\u8bc4\u4f30\u8bbe\u5907\u65f6\uff0c\u5982\u4f55\u9a8c\u8bc1\u5176\u5de5\u827a\u7a33\u5b9a\u6027\uff1f\nA\uff1a\u9664\u4e86\u67e5\u770b\u6807\u51c6\u6d4b\u8bd5\uff0c\u6700\u6709\u6548\u7684\u65b9\u5f0f\u662f\u8981\u6c42\u8fdb\u884c\u4ea7\u54c1\u5b9e\u7269\u710a\u63a5\u9a8c\u8bc1\u3002\u63d0\u4f9b\u8d35\u53f8\u7684\u5178\u578b\u4ea7\u54c1\uff08\u57fa\u677f\u3001\u82af\u7247\u3001\u710a\u6599\uff09\uff0c\u5728\u8bbe\u5907\u4e0a\u8fde\u7eed\u8fd0\u884c\u591a\u4e2a\u5de5\u827a\u5468\u671f\uff0c\u7136\u540e\u5bf9\u6210\u54c1\u8fdb\u884cX-Ray\u7a7a\u6d1e\u68c0\u6d4b\u3001\u5207\u7247\u5206\u6790\u53ca\u526a\u5207\u529b\u6d4b\u8bd5\uff0c\u4ee5\u5b9e\u9645\u6570\u636e\u5224\u65ad\u8bbe\u5907\u7684\u7a33\u5b9a\u6027\u548c\u5de5\u827a\u7a97\u53e3\u3002<\/p>\n\n
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    \n\n\n\n
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